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材料:
Al, Al-30ppmSi, Al-1%Si,
Al-1%Si-0.5%Cu, Al-0.75%Si-0.5%Cu,
Al-0.5%Cu, Al-1%Cu, Al-2%Cu, Al-4%Cu
纯度: 99.999% min.
规格:
Varian ConMag I, ConMag II, XM 90, Quantum
Anelva 1012, 1013, 1015, 1051
P.E. 4410, 4450
MRC 603, SPA, RMA
SFI Mu Insert
AMAT
ULVAC
Novellus
Oerlikon
其他规格按客户要求定制生产。
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