Material
Purity
Configurations
Al & Al alloy
5N, 5N5
NMC
Oerlikon (Balzer) TM
NEXX TM
Aviza (Trikon) TM
Tango TM
AMAT TM
Cu
4N5,5N, 6N
CuP
3N5, 4N5,5N
Ti
4N5, 5N
Ni
4N, 4N5
NiV, NiPt
3N5,4N
WTi
3N5,4N,4N5
Ag
4N,5N
Au
4N, 5N
Pt